JPH0719151Y2 - 半導体ウェハ用搬送装置の収納容器 - Google Patents

半導体ウェハ用搬送装置の収納容器

Info

Publication number
JPH0719151Y2
JPH0719151Y2 JP1987156211U JP15621187U JPH0719151Y2 JP H0719151 Y2 JPH0719151 Y2 JP H0719151Y2 JP 1987156211 U JP1987156211 U JP 1987156211U JP 15621187 U JP15621187 U JP 15621187U JP H0719151 Y2 JPH0719151 Y2 JP H0719151Y2
Authority
JP
Japan
Prior art keywords
storage container
plate
side plate
attached
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987156211U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160540U (en]
Inventor
剛志 松本
博司 原田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Corp
Original Assignee
Shimizu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimizu Corp filed Critical Shimizu Corp
Priority to JP1987156211U priority Critical patent/JPH0719151Y2/ja
Publication of JPH0160540U publication Critical patent/JPH0160540U/ja
Application granted granted Critical
Publication of JPH0719151Y2 publication Critical patent/JPH0719151Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987156211U 1987-10-13 1987-10-13 半導体ウェハ用搬送装置の収納容器 Expired - Lifetime JPH0719151Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987156211U JPH0719151Y2 (ja) 1987-10-13 1987-10-13 半導体ウェハ用搬送装置の収納容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987156211U JPH0719151Y2 (ja) 1987-10-13 1987-10-13 半導体ウェハ用搬送装置の収納容器

Publications (2)

Publication Number Publication Date
JPH0160540U JPH0160540U (en]) 1989-04-17
JPH0719151Y2 true JPH0719151Y2 (ja) 1995-05-01

Family

ID=31434544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987156211U Expired - Lifetime JPH0719151Y2 (ja) 1987-10-13 1987-10-13 半導体ウェハ用搬送装置の収納容器

Country Status (1)

Country Link
JP (1) JPH0719151Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57126144A (en) * 1981-01-29 1982-08-05 Toshiba Corp Conveying method for wafer
JPS60160539U (ja) * 1984-04-02 1985-10-25 ソニー株式会社 半導体ウエハ等収納容器

Also Published As

Publication number Publication date
JPH0160540U (en]) 1989-04-17

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